Instrumentation techniques for the control of MEMS nanopositioners
- Creator: Moore, Steven
- Resource Type: thesis
- Date: 2016
Zero displacement microelectromechanical force sensor using feedback control
- Creator: Coskun, M. Bulut , Moore, Steven , Moheimani, S. O. Reza , Neild, Adrian , Alan, Tuncay
- Resource Type: journal article
- Date: 2014
MEMS resonator with displacement sensor based on electro-thermal principles
- Creator: Moore, Steven , Moheimani, S. O. Reza
- Resource Type: conference paper
- Date: 2013